JPS5746105A - Optical chatter measurement - Google Patents

Optical chatter measurement

Info

Publication number
JPS5746105A
JPS5746105A JP12278580A JP12278580A JPS5746105A JP S5746105 A JPS5746105 A JP S5746105A JP 12278580 A JP12278580 A JP 12278580A JP 12278580 A JP12278580 A JP 12278580A JP S5746105 A JPS5746105 A JP S5746105A
Authority
JP
Japan
Prior art keywords
light
measured
xsi
chatter
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12278580A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151761B2 (en]
Inventor
Yasuo Sakai
Shozo Ogata
Mitsuo Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP12278580A priority Critical patent/JPS5746105A/ja
Publication of JPS5746105A publication Critical patent/JPS5746105A/ja
Publication of JPH0151761B2 publication Critical patent/JPH0151761B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12278580A 1980-09-04 1980-09-04 Optical chatter measurement Granted JPS5746105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12278580A JPS5746105A (en) 1980-09-04 1980-09-04 Optical chatter measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12278580A JPS5746105A (en) 1980-09-04 1980-09-04 Optical chatter measurement

Publications (2)

Publication Number Publication Date
JPS5746105A true JPS5746105A (en) 1982-03-16
JPH0151761B2 JPH0151761B2 (en]) 1989-11-06

Family

ID=14844545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12278580A Granted JPS5746105A (en) 1980-09-04 1980-09-04 Optical chatter measurement

Country Status (1)

Country Link
JP (1) JPS5746105A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010014547A (ja) * 2008-07-03 2010-01-21 Sumitomo Heavy Ind Ltd 表面検査方法、及びびびりマーク検査装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065254A (en]) * 1973-10-09 1975-06-02
JPS521307U (en]) * 1975-06-23 1977-01-07
JPS521307A (en) * 1975-06-24 1977-01-07 Nissan Motor Co Ltd Gas engine
JPS5948324A (ja) * 1982-09-07 1984-03-19 Taihei Mach Works Ltd 木材削片の配向装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5065254A (en]) * 1973-10-09 1975-06-02
JPS521307U (en]) * 1975-06-23 1977-01-07
JPS521307A (en) * 1975-06-24 1977-01-07 Nissan Motor Co Ltd Gas engine
JPS5948324A (ja) * 1982-09-07 1984-03-19 Taihei Mach Works Ltd 木材削片の配向装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010014547A (ja) * 2008-07-03 2010-01-21 Sumitomo Heavy Ind Ltd 表面検査方法、及びびびりマーク検査装置

Also Published As

Publication number Publication date
JPH0151761B2 (en]) 1989-11-06

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